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2021
1 Dahl-Hansen, Runar Plunnecke; Tyholdt, Frode; Gjessing, Jo; Vogl, Andreas; Wittendorp, Paul; Vedum, Jon; Tybell, Per Thomas Martin.
On the effect of water-induced degradation of thin-film piezoelectric microelectromechanical systems. Journal of microelectromechanical systems 2021 ;Volum 30.(1) s. 105-115
NTNU SINTEF Untitled
 
2018
2 Gjessing, Jo; Bakke, Thor; Skokic, Zeljko; Wittendorp, Paul; Suphellen, Aina.
High-frequency 2D PZT based micromirrors. PiezoMEMS; 2018-01-16 - 2018-01-18
SINTEF Untitled
 
3 Tyholdt, Frode; Wittendorp, Paul; Jain, Shruti; Dekkers, M; Wen-Jong, Wu; Spreitzer, Matjaž.
Growth of epitaxial PZT and PMN-PT for IDT electrodes on full wafer area by PLD for fabrication of energy harvesters. 2018 PiezoMEMS Workshop; 2018-01-15 - 2018-01-16
SINTEF Untitled
 
2017
4 Dekkers, M; Nguyen, M; Hildebrand, N; Abel, S; Eltes, F; Fompeyrine, J; Wittendorp, Paul.
Wafer level integration of epitaxial piezoelectric thin films for novel NEMS, MEMS and MOEMS applications. I: Advanced Materials: TechConnect Briefs 2017 : 11th Annual TechConnect World Innovation Conference and Expo, Held Jointly with the 20th Annual Nanotech Conference and Expo, and the 2017 National SBIR/STTR Conference; Washington; United States; 14 May 2017 through 17 May 2017. TechConnect 2017 ISBN 978-0-9988782-1-8. s. 55-58
SINTEF Untitled