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2019
1 Dahl-Hansen, Runar Plunnecke; Akkopru-Akgun, Betul; Denis, Lyndsey; Coleman, Kathleen; Polfus, Jonathan M.; Vøllestad, Einar; Tyholdt, Frode; Trolier-Mckinstry, Susan E; Tybell, Per Thomas Martin.
PiezoMEMS reliability: why the electrode-material matters in humid ambient. IEEE IEEE International Symposium on Applications of Ferroelectrics (ISAF), 2019; 2019-07-14 - 2019-07-19
NTNU SINTEF Untitled
 
2 Dahl-Hansen, Runar Plunnecke; Akkopru-Akgun, Betul; Vøllestad, Einar; Polfus, Jonathan M.; Denis, L; Coleman, K; Tyholdt, Frode; Trolier-Mckinstry, Susan E; Tybell, Per Thomas Martin.
Degradation of PZT in humid ambient – an electrochemically controlled process. International Workshop on Oxide Electronics; 2019-09-29 - 2019-10-02
SINTEF NTNU Untitled
 
2018
3 Dahl-Hansen, Runar Plunnecke; Dirdal, Christopher Andrew; Gjessing, Jo; Tyholdt, Frode; Tybell, Thomas.
On the dynamics of a degrading piezoelectric micromirror operated in harsh environments. NanoNetwork; 2018-06-11 - 2018-06-13
NTNU SINTEF Untitled
 
4 Dahl-Hansen, Runar Plunnecke; Tybell, Per Thomas Martin; Tyholdt, Frode.
Performance and reliability of PZT-based piezoelectric micromirrors operated in realistic environments. I: 2018 IEEE ISAF-FMA-AMF-AMEC-PFM Joint Conference (IFAAP), Hiroshima, Japan, 27 May-1 June 2018. IEEE 2018 ISBN 978-1-5386-1162-3. s. -
NTNU SINTEF Untitled
 
5 Dahl-Hansen, Runar Plunnecke; Tyholdt, Frode; Bakke, Thor; Gjessing, Jo; Vedum, Jon; Tybell, Thomas.
Breakdown mechanisms and passivation of piezoelectric micro-mirrors. NanoNetwork 2017; 2018-06-12 - 2018-06-14
NTNU SINTEF Untitled
 
6 Dahl-Hansen, Runar Plunnecke; Tyholdt, Frode; Tybell, Thomas.
Performance and reliability of PZT-based piezoelectric micromirrors operated in realistic environments. 2018 ISAF-FMA-AMF-AMEC-PFM Joint Conference (IFAAP 2018) May 27 - June 1, 2018, Hiroshima; 2018-05-27 - 2018-06-01
NTNU SINTEF Untitled
 
7 Tyholdt, Frode; Wittendorp, Paul; Jain, Shruti; Dekkers, M; Wen-Jong, Wu; Spreitzer, Matjaž.
Growth of epitaxial PZT and PMN-PT for IDT electrodes on full wafer area by PLD for fabrication of energy harvesters. 2018 PiezoMEMS Workshop; 2018-01-15 - 2018-01-16
SINTEF Untitled
 
2017
8 Dahl-Hansen, Runar Plunnecke; Tyholdt, Frode; Tybell, Thomas.
PiezoMEMS in Realistic Environments. Piezo2017; 2017-02-19 - 2017-02-22
NTNU SINTEF Untitled
 
9 Hansen, Runar; Tyholdt, Frode; Tybell, Thomas.
PiezoMEMS in realistic environments. Piezo 2017 - Electroceramics for end users IX; 2017-02-19 - 2017-02-22
SINTEF Untitled
 
10 Ræder, Henrik; Tyholdt, Frode; Dahl-Hansen, Runar Plünnecke; Vogl, Andreas; Bakke, Thor; Rørvik, Per Martin; Lapique, Fabrice.
Piezoelectric MEMS development in SINTEF. Piezo 2017 - Electroceramics for End-Users IX; 2017-02-19 - 2017-02-22
SINTEF UiO Untitled
 
11 Tyholdt, Frode; Dahl-Hansen, Runar Plunnecke; Vogl, Andreas; Bakke, Thor; Rørvik, Per Martin; Lapique, Fabrice.
Piezoelectric MEMS development in SINTEF. Piezo 2017 - Electroceramics for End-Users IX; 2017-02-19 - 2017-02-22
NTNU SINTEF Untitled
 
2016
12 Bakke, Thor; Wittendorp, Paul; Skokic, Zeljko; Tyholdt, Frode; Vogl, Andreas.
Applications of PZT-based micromirrors. piezoMEMS workshop 2016; 2016-05-24 - 2016-05-25
SINTEF Untitled
 
13 Tyholdt, Frode; Vogl, Andreas; Bakke, Thor; Lapique, Fabrice.
PiezoMEMS development from idea to product - case examples from SINTEF. COST TO-BE (Towards Oxide-Based Electronics) workshop; 2016-04-06 - 2016-04-08
SINTEF Untitled
 
2015
14 Tyholdt, Frode.
Peculiarities in chemical solution deposition of functional oxide thin films and challenges in upscaling towards production. Nanonetwork workshop 2015; 2015-06-15 - 2015-06-17
SINTEF Untitled
 
15 Vogl, Andreas; Tyholdt, Frode; Tofteberg, Hannah Rosquist; Muralt, Paul.
Piezoelectric thin film materials for MEMS. I: Handbook of Silicon based MEMS materials and Technologies. 2nd edition. Elsevier 2015 ISBN 9780323312233. s. 163-174
SINTEF Untitled
 
2014
16 Tyholdt, Frode; Vogl, Andreas; Tofteberg, Hannah Rosquist; Østbø, Niels Peter; Bakke, Thor; Lapique, Fabrice.
PiezoMEMS development from idea to product - case examples from SINTEF. piezoMEMS 2014; 2014-10-28 - 2014-10-29
SINTEF Untitled
 
17 Tyholdt, Frode; Vogl, Andreas; Tofteberg, Hannah Rosquist; Østbø, Niels Peter; Bakke, Thor; Lapique, Fabrice.
SINTEF piezoMEMS competence centre. CIMTEC 2014 - The 13th International Ceramics Congress; 2014-06-09 - 2014-06-13
SINTEF Untitled
 
2013
18 Tyholdt, Frode.
FP7 piezoVolume – High volume production processes for piezoelectric microsystems. Commercial Micro Manufacturing 2013 ;Volum 6.(2) s. 32-34
SINTEF Untitled
 
19 Tyholdt, Frode; Tofteberg, Hannah Rosquist; Østbø, Niels Peter; Bakke, Thor; Vogl, Andreas.
SINTEF piezoMEMS competence centre. piezoMEMS workshop 2013; 2013-04-09 - 2013-04-10
SINTEF Untitled
 
20 Østbø, Niels Peter; Tyholdt, Frode; Tofteberg, Hannah Rosquist; Vogl, Andreas.
piezoMEMS competence centre established at SINTEF. Micronews 2013 ;Volum 139. s. 3-
SINTEF Untitled
 
2012
21 Bouquet, Gregory; O'Farrell, Marion; Stange, Marit Synnøve Sæverud; Tyholdt, Frode; Fossdal, Anita; Thøgersen, Annett; Ferber, Alain Marc C; Løvhaugen, Odd.
Energy selective X-ray system using multilayer. Northern optics 2012; 2012-11-19 - 2012-11-21
SINTEF Untitled
 
22 Muralt, Paul; Tyholdt, Frode.
High Volume Piezoelectric Thin Film Production Process for Microsystems. 2012 Joint IEEE International Symposium on the Applications of Ferroelectrics, European Conference on Applications of Polar Dielectrics & Workshop on Piezoresponse Force Microscopy; 2012-07-09 - 2012-09-13
SINTEF Untitled
 
23 Nguyen-Dinh, An; Wang, Dag Thorstein; Meynier, Cyril; Tyholdt, Frode; Vogl, Andreas; Tofteberg, Hannah Karin Kristin Rosquist; Østbø, Niels Peter; Flesch, E.
pMUT for high intensity focused ultrasound. I: 2012 IEEE International Ultrasonics Symposium (IUS), Dresden, 7-10 Oct. 2012. IEEE conference proceedings 2012 ISBN 978-1-4673-4561-3. s. 1 --5
SINTEF Untitled
 
24 Rørvik, Per Martin; Tyholdt, Frode; Ræder, Johan Henrik.
Chemical solution deposition of K(1-x)Na(x)NbO(3) thin films. Electroceramics XIII; 2012-06-24 - 2012-06-27
SINTEF Untitled
 
25 Tyholdt, Frode.
High Volume Piezoelectric Thin Film Production Process for Microsystems. Commercialization of Micro-, Nano-, and Emerging Technologies (COMS) 2012; 2012-07-24 - 2012-07-27
SINTEF Untitled
 
2011
26 Heinonen, E.; Juuti, J.; Palosaari, J.; Tyholdt, Frode; Jantunen, H.; Østbø, Niels Peter; Vogl, Andreas; Poppe, Erik; Guðbjörnsson, S.; Ringgaard, E.; Hök, B; Fägerman, P.-E.; Gløersen, P.; Ræder, H.
High performance thin film PZT ultrasonic transducer by CSD for distance measurements in water. Journal of Electroceramics 2011 ;Volum 27.(1) s. 24-28
SINTEF Untitled
 
27 Min, Deokki; Hoivik, Nils; Jensen, Geir Uri; Tyholdt, Frode; Haavik, Camilla; Hanke, Ulrik.
Dielectric properties of thin-film ZrO2 up to 50 GHz for RF MEMS switches. Applied Physics A: Materials Science & Processing 2011 ;Volum 105.(4) s. 867-874
USN SINTEF Untitled
 
28 Min, Deokki; Hoivik, Nils; Jensen, Geir Uri; Tyholdt, Frode; Hanke, Ulrik.
The microwave dielectric properties of dual-layer PZT/ZrO₂thin films deposited by chemical solution deposition. Journal of Physics D: Applied Physics 2011 ;Volum 44.(25) s. -
USN SINTEF Untitled
 
29 Tyholdt, Frode; Haavik, Camilla; Mazzalai, Andrea; Tiedke, Stephan; Kessels, Roland; Kratzer, Martin; Kaden, Dirk; Schröpfer, Gerold; Cruau, Aurelie; Muffler, Pirmin; Herrmann, Rainer; Muralt, Paul.
FP7 piezoVolume - High Volume Piezoelectric Thin Film Production Process For Microsystems. piezoMEMS 2011; 2011-09-06 - 2011-09-07
SINTEF Untitled
 
2010
30 Bakke, Thor; Vogl, Andreas; Zero, Oleg; Tyholdt, Frode; Johansen, Ib-Rune; Wang, Dag Thorstein.
A novel ultra-planar, long-stroke and low-voltage piezoelectric micromirror. Journal of Micromechanics and Microengineering 2010 ;Volum 20.(6) s. -
NTNU SINTEF Untitled
 
31 Bouquet, Gregory; Tyholdt, Frode; Paulsen, Ove; Løvhaugen, Odd; Fossdal, Anita; Ferber, Alain Marc C; hansen, thor erik.
Optical elements for x-ray spectroscopic systems. Norwegian electro-optics meeting; 2010-04-07 - 2010-04-09
SINTEF Untitled
 
32 Diplas, Spyridon; Løvvik, Ole Martin; Nordmark, Heidi; Kepaptsoglou, Despoina Maria; Graff, Joachim Seland; Ladam, Cecile; Tyholdt, Frode; Walmsley, John; Gunnæs, Anette Eleonora; Fagerberg, Ragnar; Ulyashin, Alexander.
Characterization of thin and ultrathin transparent conducting oxide (TCO) films and TCO-Si interfaces with XPS, TEM and ab initio modeling. Surface and Interface Analysis 2010 ;Volum 42.(6-7) s. 874-877
SINTEF UiO Untitled
 
33 Hansen, Thor-Erik; Ferber, Alain Marc C; Ahmed, Niaz; Løvhaugen, Odd; Østby, Joar Martin; Bouquet, Grégory; Tyholdt, Frode; Hjelstuen, Magnus; Paulsen, Ove Bjørn.
A Novel X-ray Detector System. N41-114, IEEE NSS – MIC; 2010-10-30 - 2010-11-06
SINTEF Untitled
 
34 Hansen, Thor-Erik; Ferber, Alain Marc C; Ahmed, Niaz; Løvhaugen, Odd; Østby, Joar Martin; Bouquet, Grégory; Tyholdt, Frode; Hjelstuen, Magnus; Paulsen, Ove Bjørn.
A Novel X-ray Detector System. 6TH World Congress on Process Tomography; 2010-09-06 - 2010-09-09
SINTEF Untitled
 
35 Tyholdt, Frode.
FP7 piezoVolume - High Volume Piezoelectric Thin Film Production Process For Microsystems. piezoMEMS 2010; 2010-05-18 - 2010-05-19
SINTEF Untitled
 
36 Tyholdt, Frode; Bakke, Thor; Vogl, Andreas; Poppe, Erik; Tofteberg, Hannah Rosquist; Østbø, Niels Peter; Haavik, Camilla; Wang, Dag Thorstein.
SINTEF moveMEMS – a standard process for piezoelectric microsystems prototyping. Electroceramics XII; 2010-06-13 - 2010-06-16
SINTEF Untitled
 
37 Tyholdt, Frode; Østbø, Niels Peter; Hök, Bertil; Ringgaard, Erling; Heinonen, Esa; Ræder, Henrik; Juuti, Jari; Fägerman, Per-Erik; Gudbjörnsson, Sigmar.
Piezoelectric micro-electromechanical systems for Nordic industry (NORD-pie). Copenhagen: Nordic Council of Ministers 2010 60 s.
SINTEF Untitled
 
2009
38 Simon, Christian; Pilz, Monika; Yang, Juan; Haavik, Camilla; Tyholdt, Frode; Ulyashin, Alexander G.; Tilset, Bente Gilbu; Ræder, Johan Henrik; Luxsacumar, Sivakanesar; Kaus, Ingeborg; Mokkelbost, Tommy; Bredesen, Rune.
Multifunctional Nanosized Particles and Capsules – Coatings and Thin Films Applied in Thin Film Solar Cells, Fuel Cells, Sensors, Medicine and as Protective Coatings. Nanotech Europe 2009; 2009-09-28 - 2009-09-30
SINTEF Untitled
 
39 Simon, Christian; Ulyashin, Alexander G.; Haavik, Camilla; Tyholdt, Frode; Ræder, Johan Henrik; Bredesen, Rune.
Formation of nano-structures on surfaces of TCO materials and interfaces of heterojunction solar cells upon processing or post-deposition hydrogen plasma treatments. Nanotech Europe; 2009-09-28 - 2009-09-30
SINTEF Untitled
 
40 Tyholdt, Frode; Vogl, Andreas; Poppe, Erik; Tofteberg, Hannah Rosquist; Østbø, Niels Peter; Bakke, Thor; Mielnik, Michal Marek; Haavik, Camilla; Wang, Dag Thorstein.
Commercial prototyping of piezoelectric microsystems. E-MRS 2009; 2009-06-08 - 2009-06-12
SINTEF Untitled
 
41 Tyholdt, Frode; Vogl, Andreas; Poppe, Erik; Østbø, Niels Peter; Wang, Dag Thorstein.
SINTEF moveMEMS – piezoelectric microsystems for industry. Nanotech Europe 2009; 2009-09-28 - 2009-09-30
SINTEF Untitled
 
2008
42 Haavik, Camilla; Tyholdt, Frode; Røyset, Arne Karstein; Neegaard, Steinar; Johnsen, Lars; Ladam, Cecile; Ræder, Johan Henrik; Fagerberg, Ragnar.
PLZT BASED MACH-ZEHNDER WAVE-GUIDE. Electroceramics XI; 2008-09-01 - 2008-09-03
SINTEF Untitled
 
43 Mokkelbost, Tommy; Tyholdt, Frode; Kaus, Ingeborg; Fossdal, Anita; Ladam, Cecile; Valset, Kjetil; Fagerberg, Ragnar; Garskaite, Edita; Grande, Tor.
Preparation and characterization of Er(III) doped Y2O3 thin films for enhanced solar cell efficiency. The 23rd European Photovoltaic Solar Energy Conference; 2008-10-01 - 2008-10-05
NTNU SINTEF NMBU Untitled
 
44 Tyholdt, Frode.
Chemical solution deposition of piezoelectric Pb(Zr,Ti)O₃ and multiferroic BiFeO₃thin films. Oslo: Department of Chemistry, Faculty of Mathematics and Natural Sciences, University of Oslo Unipub 2008 192 s.
SINTEF Untitled
 
45 Tyholdt, Frode.
Chemical solution deposition of piezoelectric Pb(Zr,Ti)O3 and multiferroic BiFeO3 thin films. : Universitetet i Oslo 2008
SINTEF UiO Untitled
 
46 Tyholdt, Frode; Østbø, Niels Peter; Vogl, Andreas; Poppe, Erik.
High performance thin film PZT ultrasonic transducer by CSD for distance measurements in water. Electroceramics XI; 2008-08-31 - 2008-09-04
SINTEF Untitled
 
47 Tyholdt, Frode; Østbø, Niels Peter; Vogl, Andreas; Poppe, Erik.
Piezoelectric Microsystems for Industry. Nanotech Northern Europe 2008; 2008-09-23 - 2008-09-25
SINTEF Untitled
 
48 Tyholdt, Frode; Østbø, Niels Peter; Vogl, Andreas; Poppe, Erik.
Piezoelectric Microsystems for Industry. Electroceramics XI; 2008-08-31 - 2008-09-04
SINTEF Untitled
 
2007
49 Poppe, Erik; Østbø, Niels Peter; Tyholdt, Frode.
Qualification and applications of a piezoelectric MEMS process. I: International Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007, Lyon 10-14 June, 2007. IEEE 2007 ISBN 1424408423. s. 529-532
SINTEF Untitled
 
50 Ræder, Johan Henrik; Tyholdt, Frode; Østbø, Niels Peter; Bredesen, Rune.
Taking piezoelectric microsystems from the laboratory to production. Journal of Electroceramics 2007 ;Volum 19.(4) s. 357-362
SINTEF Untitled
 
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