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2021
1 Dahl-Hansen, Runar Plunnecke; Tyholdt, Frode; Gjessing, Jo; Vogl, Andreas; Wittendorp, Paul; Vedum, Jon; Tybell, Per Thomas Martin.
On the effect of water-induced degradation of thin-film piezoelectric microelectromechanical systems. Journal of microelectromechanical systems 2021 ;Volume 30.(1) p. 105-115
NTNU SINTEF Untitled
 
2020
2 Dahl-Hansen, Runar Plunnecke; Polfus, Jonathan Marc; Vøllestad, Einar; Akkopru-Akgun, Betul; Denis, Lyndsey; Coleman, Kathleen; Tyholdt, Frode; Trolier-Mckinstry, Susan E; Tybell, Per Thomas Martin.
Electrochemically driven degradation of chemical solution deposited ferroelectric thin-films in humid ambient. Journal of Applied Physics 2020 ;Volume 127.
NTNU SINTEF Untitled
 
2019
3 Dahl-Hansen, Runar Plunnecke; Akkopru-Akgun, Betul; Denis, Lyndsey; Coleman, Kathleen; Polfus, Jonathan M.; Vøllestad, Einar; Tyholdt, Frode; Trolier-Mckinstry, Susan E; Tybell, Per Thomas Martin.
PiezoMEMS reliability: why the electrode-material matters in humid ambient. IEEE IEEE International Symposium on Applications of Ferroelectrics (ISAF), 2019; 2019-07-14 - 2019-07-19
NTNU SINTEF Untitled
 
4 Dahl-Hansen, Runar Plunnecke; Akkopru-Akgun, Betul; Vøllestad, Einar; Polfus, Jonathan M.; Denis, L; Coleman, K; Tyholdt, Frode; Trolier-Mckinstry, Susan E; Tybell, Per Thomas Martin.
Degradation of PZT in humid ambient – an electrochemically controlled process. International Workshop on Oxide Electronics; 2019-09-29 - 2019-10-02
SINTEF NTNU Untitled
 
5 Dahl-Hansen, Runar Plunnecke; Dirdal, Christopher Andrew; Gjessing, Jo; Tybell, Per Thomas Martin; Tyholdt, Frode.
Dynamical Behaviour of a piezoMEMS Micromirror During Degradation. 2019 IEEE International Symposium on Applications of Ferroelectrics (ISAF); 2019-07-14 - 2019-07-19
SINTEF NTNU Untitled
 
2018
6 Dahl-Hansen, Runar Plunnecke; Dirdal, Christopher Andrew; Gjessing, Jo; Tyholdt, Frode; Tybell, Thomas.
On the dynamics of a degrading piezoelectric micromirror operated in harsh environments. NanoNetwork; 2018-06-11 - 2018-06-13
NTNU SINTEF Untitled
 
7 Dahl-Hansen, Runar Plunnecke; Tybell, Per Thomas Martin; Tyholdt, Frode.
Performance and reliability of PZT-based piezoelectric micromirrors operated in realistic environments. I: 2018 IEEE ISAF-FMA-AMF-AMEC-PFM Joint Conference (IFAAP), Hiroshima, Japan, 27 May-1 June 2018. IEEE 2018 ISBN 978-1-5386-1162-3. p. -
NTNU SINTEF Untitled
 
8 Dahl-Hansen, Runar Plunnecke; Tyholdt, Frode; Bakke, Thor; Gjessing, Jo; Vedum, Jon; Tybell, Thomas.
Breakdown mechanisms and passivation of piezoelectric micro-mirrors. NanoNetwork 2017; 2018-06-12 - 2018-06-14
NTNU SINTEF Untitled
 
9 Dahl-Hansen, Runar Plunnecke; Tyholdt, Frode; Tybell, Thomas.
Performance and reliability of PZT-based piezoelectric micromirrors operated in realistic environments. 2018 ISAF-FMA-AMF-AMEC-PFM Joint Conference (IFAAP 2018) May 27 - June 1, 2018, Hiroshima; 2018-05-27 - 2018-06-01
NTNU SINTEF Untitled
 
10 Tyholdt, Frode; Wittendorp, Paul; Jain, Shruti; Dekkers, M; Wen-Jong, Wu; Spreitzer, Matjaž.
Growth of epitaxial PZT and PMN-PT for IDT electrodes on full wafer area by PLD for fabrication of energy harvesters. 2018 PiezoMEMS Workshop; 2018-01-15 - 2018-01-16
SINTEF Untitled
 
2017
11 Dahl-Hansen, Runar Plunnecke; Tyholdt, Frode; Tybell, Thomas.
PiezoMEMS in Realistic Environments. Piezo2017; 2017-02-19 - 2017-02-22
NTNU SINTEF Untitled
 
12 Hansen, Runar; Tyholdt, Frode; Tybell, Thomas.
PiezoMEMS in realistic environments. Piezo 2017 - Electroceramics for end users IX; 2017-02-19 - 2017-02-22
SINTEF Untitled
 
13 Ræder, Henrik; Tyholdt, Frode; Dahl-Hansen, Runar Plünnecke; Vogl, Andreas; Bakke, Thor; Rørvik, Per Martin; Lapique, Fabrice.
Piezoelectric MEMS development in SINTEF. Piezo 2017 - Electroceramics for End-Users IX; 2017-02-19 - 2017-02-22
SINTEF UiO Untitled
 
14 Tyholdt, Frode; Dahl-Hansen, Runar Plunnecke; Vogl, Andreas; Bakke, Thor; Rørvik, Per Martin; Lapique, Fabrice.
Piezoelectric MEMS development in SINTEF. Piezo 2017 - Electroceramics for End-Users IX; 2017-02-19 - 2017-02-22
NTNU SINTEF Untitled
 
2016
15 Bakke, Thor; Wittendorp, Paul; Skokic, Zeljko; Tyholdt, Frode; Vogl, Andreas.
Applications of PZT-based micromirrors. piezoMEMS workshop 2016; 2016-05-24 - 2016-05-25
SINTEF Untitled
 
16 Tyholdt, Frode; Vogl, Andreas; Bakke, Thor; Lapique, Fabrice.
PiezoMEMS development from idea to product - case examples from SINTEF. COST TO-BE (Towards Oxide-Based Electronics) workshop; 2016-04-06 - 2016-04-08
SINTEF Untitled
 
2015
17 Tyholdt, Frode.
Peculiarities in chemical solution deposition of functional oxide thin films and challenges in upscaling towards production. Nanonetwork workshop 2015; 2015-06-15 - 2015-06-17
SINTEF Untitled
 
18 Vogl, Andreas; Tyholdt, Frode; Tofteberg, Hannah Rosquist; Muralt, Paul.
Piezoelectric thin film materials for MEMS. I: Handbook of Silicon based MEMS materials and Technologies. 2nd edition. Elsevier 2015 ISBN 9780323312233. p. 163-174
SINTEF Untitled
 
2014
19 Tyholdt, Frode; Vogl, Andreas; Tofteberg, Hannah Rosquist; Østbø, Niels Peter; Bakke, Thor; Lapique, Fabrice.
PiezoMEMS development from idea to product - case examples from SINTEF. piezoMEMS 2014; 2014-10-28 - 2014-10-29
SINTEF Untitled
 
20 Tyholdt, Frode; Vogl, Andreas; Tofteberg, Hannah Rosquist; Østbø, Niels Peter; Bakke, Thor; Lapique, Fabrice.
SINTEF piezoMEMS competence centre. CIMTEC 2014 - The 13th International Ceramics Congress; 2014-06-09 - 2014-06-13
SINTEF Untitled
 
2013
21 Tyholdt, Frode.
FP7 piezoVolume – High volume production processes for piezoelectric microsystems. Commercial Micro Manufacturing 2013 ;Volume 6.(2) p. 32-34
SINTEF Untitled
 
22 Tyholdt, Frode; Tofteberg, Hannah Rosquist; Østbø, Niels Peter; Bakke, Thor; Vogl, Andreas.
SINTEF piezoMEMS competence centre. piezoMEMS workshop 2013; 2013-04-09 - 2013-04-10
SINTEF Untitled
 
23 Østbø, Niels Peter; Tyholdt, Frode; Tofteberg, Hannah Rosquist; Vogl, Andreas.
piezoMEMS competence centre established at SINTEF. Micronews 2013 ;Volume 139. p. 3-
SINTEF Untitled
 
2012
24 Bouquet, Gregory; O'Farrell, Marion; Stange, Marit Synnøve Sæverud; Tyholdt, Frode; Fossdal, Anita; Thøgersen, Annett; Ferber, Alain Marc C; Løvhaugen, Odd.
Energy selective X-ray system using multilayer. Northern optics 2012; 2012-11-19 - 2012-11-21
SINTEF Untitled
 
25 Muralt, Paul; Tyholdt, Frode.
High Volume Piezoelectric Thin Film Production Process for Microsystems. 2012 Joint IEEE International Symposium on the Applications of Ferroelectrics, European Conference on Applications of Polar Dielectrics & Workshop on Piezoresponse Force Microscopy; 2012-07-09 - 2012-09-13
SINTEF Untitled
 
26 Nguyen-Dinh, An; Wang, Dag Thorstein; Meynier, Cyril; Tyholdt, Frode; Vogl, Andreas; Tofteberg, Hannah Karin Kristin Rosquist; Østbø, Niels Peter; Flesch, E.
pMUT for high intensity focused ultrasound. I: 2012 IEEE International Ultrasonics Symposium (IUS), Dresden, 7-10 Oct. 2012. IEEE conference proceedings 2012 ISBN 978-1-4673-4561-3. p. 1 --5
SINTEF Untitled
 
27 Rørvik, Per Martin; Tyholdt, Frode; Ræder, Johan Henrik.
Chemical solution deposition of K(1-x)Na(x)NbO(3) thin films. Electroceramics XIII; 2012-06-24 - 2012-06-27
SINTEF Untitled
 
28 Tyholdt, Frode.
High Volume Piezoelectric Thin Film Production Process for Microsystems. Commercialization of Micro-, Nano-, and Emerging Technologies (COMS) 2012; 2012-07-24 - 2012-07-27
SINTEF Untitled
 
2011
29 Heinonen, E.; Juuti, J.; Palosaari, J.; Tyholdt, Frode; Jantunen, H.; Østbø, Niels Peter; Vogl, Andreas; Poppe, Erik; Guðbjörnsson, S.; Ringgaard, E.; Hök, B; Fägerman, P.-E.; Gløersen, P.; Ræder, H.
High performance thin film PZT ultrasonic transducer by CSD for distance measurements in water. Journal of Electroceramics 2011 ;Volume 27.(1) p. 24-28
SINTEF Untitled
 
30 Min, Deokki; Hoivik, Nils; Jensen, Geir Uri; Tyholdt, Frode; Haavik, Camilla; Hanke, Ulrik.
Dielectric properties of thin-film ZrO2 up to 50 GHz for RF MEMS switches. Applied Physics A: Materials Science & Processing 2011 ;Volume 105.(4) p. 867-874
USN SINTEF Untitled
 
31 Min, Deokki; Hoivik, Nils; Jensen, Geir Uri; Tyholdt, Frode; Hanke, Ulrik.
The microwave dielectric properties of dual-layer PZT/ZrO₂thin films deposited by chemical solution deposition. Journal of Physics D: Applied Physics 2011 ;Volume 44.(25) p. -
USN SINTEF Untitled
 
32 Tyholdt, Frode; Haavik, Camilla; Mazzalai, Andrea; Tiedke, Stephan; Kessels, Roland; Kratzer, Martin; Kaden, Dirk; Schröpfer, Gerold; Cruau, Aurelie; Muffler, Pirmin; Herrmann, Rainer; Muralt, Paul.
FP7 piezoVolume - High Volume Piezoelectric Thin Film Production Process For Microsystems. piezoMEMS 2011; 2011-09-06 - 2011-09-07
SINTEF Untitled
 
2010
33 Bakke, Thor; Vogl, Andreas; Zero, Oleg; Tyholdt, Frode; Johansen, Ib-Rune; Wang, Dag Thorstein.
A novel ultra-planar, long-stroke and low-voltage piezoelectric micromirror. Journal of Micromechanics and Microengineering (JMM) 2010 ;Volume 20.(6) p. -
NTNU SINTEF Untitled
 
34 Bouquet, Gregory; Tyholdt, Frode; Paulsen, Ove; Løvhaugen, Odd; Fossdal, Anita; Ferber, Alain Marc C; hansen, thor erik.
Optical elements for x-ray spectroscopic systems. Norwegian electro-optics meeting; 2010-04-07 - 2010-04-09
SINTEF Untitled
 
35 Diplas, Spyridon; Løvvik, Ole Martin; Nordmark, Heidi; Kepaptsoglou, Despoina Maria; Graff, Joachim Seland; Ladam, Cecile; Tyholdt, Frode; Walmsley, John; Gunnæs, Anette Eleonora; Fagerberg, Ragnar; Ulyashin, Alexander.
Characterization of thin and ultrathin transparent conducting oxide (TCO) films and TCO-Si interfaces with XPS, TEM and ab initio modeling. Surface and Interface Analysis 2010 ;Volume 42.(6-7) p. 874-877
SINTEF UiO Untitled
 
36 Hansen, Thor-Erik; Ferber, Alain Marc C; Ahmed, Niaz; Løvhaugen, Odd; Østby, Joar Martin; Bouquet, Grégory; Tyholdt, Frode; Hjelstuen, Magnus; Paulsen, Ove Bjørn.
A Novel X-ray Detector System. N41-114, IEEE NSS – MIC; 2010-10-30 - 2010-11-06
SINTEF Untitled
 
37 Hansen, Thor-Erik; Ferber, Alain Marc C; Ahmed, Niaz; Løvhaugen, Odd; Østby, Joar Martin; Bouquet, Grégory; Tyholdt, Frode; Hjelstuen, Magnus; Paulsen, Ove Bjørn.
A Novel X-ray Detector System. 6TH World Congress on Process Tomography; 2010-09-06 - 2010-09-09
SINTEF Untitled
 
38 Tyholdt, Frode.
FP7 piezoVolume - High Volume Piezoelectric Thin Film Production Process For Microsystems. piezoMEMS 2010; 2010-05-18 - 2010-05-19
SINTEF Untitled
 
39 Tyholdt, Frode; Bakke, Thor; Vogl, Andreas; Poppe, Erik; Tofteberg, Hannah Rosquist; Østbø, Niels Peter; Haavik, Camilla; Wang, Dag Thorstein.
SINTEF moveMEMS – a standard process for piezoelectric microsystems prototyping. Electroceramics XII; 2010-06-13 - 2010-06-16
SINTEF Untitled
 
40 Tyholdt, Frode; Østbø, Niels Peter; Hök, Bertil; Ringgaard, Erling; Heinonen, Esa; Ræder, Henrik; Juuti, Jari; Fägerman, Per-Erik; Gudbjörnsson, Sigmar.
Piezoelectric micro-electromechanical systems for Nordic industry (NORD-pie). Copenhagen: Nordic Council of Ministers 2010 60 p.
SINTEF Untitled
 
2009
41 Simon, Christian; Pilz, Monika; Yang, Juan; Haavik, Camilla; Tyholdt, Frode; Ulyashin, Alexander G.; Tilset, Bente Gilbu; Ræder, Johan Henrik; Luxsacumar, Sivakanesar; Kaus, Ingeborg; Mokkelbost, Tommy; Bredesen, Rune.
Multifunctional Nanosized Particles and Capsules – Coatings and Thin Films Applied in Thin Film Solar Cells, Fuel Cells, Sensors, Medicine and as Protective Coatings. Nanotech Europe 2009; 2009-09-28 - 2009-09-30
SINTEF Untitled
 
42 Simon, Christian; Ulyashin, Alexander G.; Haavik, Camilla; Tyholdt, Frode; Ræder, Johan Henrik; Bredesen, Rune.
Formation of nano-structures on surfaces of TCO materials and interfaces of heterojunction solar cells upon processing or post-deposition hydrogen plasma treatments. Nanotech Europe; 2009-09-28 - 2009-09-30
SINTEF Untitled
 
43 Tyholdt, Frode; Vogl, Andreas; Poppe, Erik; Tofteberg, Hannah Rosquist; Østbø, Niels Peter; Bakke, Thor; Mielnik, Michal Marek; Haavik, Camilla; Wang, Dag Thorstein.
Commercial prototyping of piezoelectric microsystems. E-MRS 2009; 2009-06-08 - 2009-06-12
SINTEF Untitled
 
44 Tyholdt, Frode; Vogl, Andreas; Poppe, Erik; Østbø, Niels Peter; Wang, Dag Thorstein.
SINTEF moveMEMS – piezoelectric microsystems for industry. Nanotech Europe 2009; 2009-09-28 - 2009-09-30
SINTEF Untitled
 
2008
45 Haavik, Camilla; Tyholdt, Frode; Røyset, Arne Karstein; Neegaard, Steinar; Johnsen, Lars; Ladam, Cecile; Ræder, Johan Henrik; Fagerberg, Ragnar.
PLZT BASED MACH-ZEHNDER WAVE-GUIDE. Electroceramics XI; 2008-09-01 - 2008-09-03
SINTEF Untitled
 
46 Mokkelbost, Tommy; Tyholdt, Frode; Kaus, Ingeborg; Fossdal, Anita; Ladam, Cecile; Valset, Kjetil; Fagerberg, Ragnar; Garskaite, Edita; Grande, Tor.
Preparation and characterization of Er(III) doped Y2O3 thin films for enhanced solar cell efficiency. The 23rd European Photovoltaic Solar Energy Conference; 2008-10-01 - 2008-10-05
NTNU SINTEF NMBU Untitled
 
47 Tyholdt, Frode.
Chemical solution deposition of piezoelectric Pb(Zr,Ti)O₃ and multiferroic BiFeO₃thin films. Oslo: Department of Chemistry, Faculty of Mathematics and Natural Sciences, University of Oslo Unipub 2008 192 p.
SINTEF Untitled
 
48 Tyholdt, Frode.
Chemical solution deposition of piezoelectric Pb(Zr,Ti)O3 and multiferroic BiFeO3 thin films. : Universitetet i Oslo 2008
SINTEF UiO Untitled
 
49 Tyholdt, Frode; Østbø, Niels Peter; Vogl, Andreas; Poppe, Erik.
High performance thin film PZT ultrasonic transducer by CSD for distance measurements in water. Electroceramics XI; 2008-08-31 - 2008-09-04
SINTEF Untitled
 
50 Tyholdt, Frode; Østbø, Niels Peter; Vogl, Andreas; Poppe, Erik.
Piezoelectric Microsystems for Industry. Nanotech Northern Europe 2008; 2008-09-23 - 2008-09-25
SINTEF Untitled
 
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